HAFNIUM TERT-BUTOXIDE
HAFNIUM TERT-BUTOXIDE
  • CAS No.:2172-02-3
Other grades of this product :
HAFNIUM TERT-BUTOXIDE Basic information
Product Name:HAFNIUM TERT-BUTOXIDE
Synonyms:HAFNIUM (IV) T-BUTOXIDE;HAFNIUM T-BUTOXIDE;HAFNIUM TERT-BUTOXIDE;HAFNIUM TETRA-T-BUTOXIDE;Hafnium(IV) t-butoxide (99.9%-Hf);Hafnium tert-butoxide, 99.9% (metals basis excluding Zr), Zr< 0.2%;Hafnium(IV) tert-butoxide;Hafnium(IV) tert-butoxide, 99.9% trace metals basis excluding Zr
CAS:2172-02-3
MF:C16H36HfO4
MW:470.94
EINECS:
Product Categories:metal alkoxide;Hafnium;Micro/Nanoelectronics;Solution Deposition Precursors
Mol File:2172-02-3.mol
HAFNIUM TERT-BUTOXIDE Chemical Properties
Melting point 2℃
Boiling point 90 °C5 mm Hg(lit.)
density 1.166 g/mL at 25 °C(lit.)
refractive index n20/D 1.424(lit.)
Fp 83 °F
solubility Soluble in hydrocarbons, reacts with alcohols, ketones, and esters
form Liquid
Specific Gravity1.166
Hydrolytic Sensitivity7: reacts slowly with moisture/water
Sensitive Moisture Sensitive/Light Sensitive
Exposure limitsACGIH: TWA 0.5 mg/m3NIOSH: IDLH 50 mg/m3; TWA 0.5 mg/m3
CAS DataBase Reference2172-02-3(CAS DataBase Reference)
Safety Information
Hazard Codes Xi
Risk Statements 10-36/37/38
Safety Statements 16-26
RIDADR UN 1993 3/PG 3
WGK Germany 3
TSCA No
HazardClass 3
PackingGroup II
HS Code 2905190019
MSDS Information
ProviderLanguage
SigmaAldrich English
ALFA English
HAFNIUM TERT-BUTOXIDE Usage And Synthesis
UsesHafnium tert-butoxide [Hf(OtBu)4] is a mononuclear; volatile; and highly promising precursor for the deposition of HfO2 and other hafnium doped thin films by vapor deposition techniques. The deposited films show high dielectric constant suitable for semiconductor devices.
General DescriptionAtomic number of base material: 72 Hafnium
HAFNIUM TERT-BUTOXIDE Preparation Products And Raw materials

Welcome!

Please leave a message for us or use the following ways to contact us, we will reply to you as soon as possible, and provide you with the most sincere service, thank you.

  • NO. 18 ,Wujiang Road, Wulidian Street, Jiangbei District, Chongqing
  • +86-23-6139-8061 +86-13650506873
  • danny@chemdad.com sales@chemdad.com
  • www.chemdad.com
  • WhatsApp +86-13650506873

Name

phone

company

email

message

Google translate: 日本语 한국어 Français Deutsch España Türkiye